Fabrication of ZnO sensor to measure pressure, humidity and sense gases at room temperature by using rapid breakdown anodization method

Authors

  • Mustafa Shakir Hashim Physics department, Education College, Mustansiriyah University.Baghdad-Iraq.
  • Reem Saadi Khaleel Physics department, Education College, Mustansiriyah University.Baghdad-Iraq.

Keywords:

SP/065

Abstract

Rapid breakdown anodization (RBA) process was used to fabricate ZnO sensor to measure pressure, humidity and sense vapors. This electrochemical process transformed Zn metal to its oxide ZnO as X ray diffraction (XRD) techniques confirmed.  RBA formed semispherical ZnO nanoparticles (ZNPs) with sizes ranged from 10 to 20 nm as Scanning electron microscope (SEM) showed.   These nanoparticles were deposited on Zn substrates by using electrophoretic deposition (EPD) method. After deposition ZNPs aggregated and formed large continuous bodies. Atomic force microscopy (AFM) images showed the vertical growth of ZNPs and confirmed the existence of porosity between these particles. Sensing parameters of ZnO to pressure were: average sensitivity (0.485 MΩ/bar) and Hysteresis area (0.9 MΩ.bar). Resistance of ZnO (RZnO) varies exponentially with relative humidity RH% and its average humidity sensitivity in the range of (20 to 50 RH%) was 52% and 95%  in the range of (50 to 90 % RH). The sensing response to Ammonia, Ethanol and Methanol vapors were recorded with different concentrations. The sensitivity of ZnO senor is greater for Methanol but the it's selectivity was better for Ammonia.

Author Biographies

Mustafa Shakir Hashim, Physics department, Education College, Mustansiriyah University.Baghdad-Iraq.

Dr. Mustafa Sh. Hasim Al-Hilfi is an Assistant Professor of Physics at the College of Education, Al-Mustansiriyah University. Born in Baghdad, IRAQ, he was awarded in 1994 the B.Sc. Degree of Physics from the University of Baghdad, IRAQ. In 1997, he was awarded the M.Sc. from Al-Nahrein University. In 2013 he was awarded Ph.D. Degree from Al-Mustansiriyah University, IRAQ. He has 20+ years of Academic experience. Since 2006, he has taught at Al-Mustansiriysh University. From 1998 to 2006 he was a lecturer at Al-Tahadi University in Libya and The Higher Institute of preparing teachers in Libya.

 

Reem Saadi Khaleel, Physics department, Education College, Mustansiriyah University.Baghdad-Iraq.

Dr. Reem Saadi Khaleel is an Assistant Professor of Physics at the College of Education, Al-Mustansiriyah University. Born in Baghdad, IRAQ, she was awarded in 1992 the B.Sc. Degree of Physics from the University of Baghdad, IRAQ. In 1998, she was awarded the M.Sc. from Baghdad University. In 2016 she was awarded Ph.D. Degree from Al-Mustansiriyah University, IRAQ. She has 23+ years of Academic experience. Since 2006, she has taught at Al-Mustansiriysh University. From 1993 to 2000 she was a lecturer at Baghdad University. From 2000 to 2006 she was a lecturer at the Higher Institute of preparing teachers in Libya.

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Published

2020-01-20