Fabrication of ZnO sensor to measure pressure, humidity and sense gases at room temperature by using rapid breakdown anodization method

Mustafa Shakir Hashim, Reem Saadi Khaleel

Abstract


Rapid breakdown anodization (RBA) process was used to fabricate ZnO sensor to measure pressure, humidity and sense vapors. This electrochemical process transformed Zn metal to its oxide ZnO as X ray diffraction (XRD) techniques confirmed.  RBA formed semispherical ZnO nanoparticles (ZNPs) with sizes ranged from 10 to 20 nm as Scanning electron microscope (SEM) showed.   These nanoparticles were deposited on Zn substrates by using electrophoretic deposition (EPD) method. After deposition ZNPs aggregated and formed large continuous bodies. Atomic force microscopy (AFM) images showed the vertical growth of ZNPs and confirmed the existence of porosity between these particles. Sensing parameters of ZnO to pressure were: average sensitivity (0.485 MΩ/bar) and Hysteresis area (0.9 MΩ.bar). Resistance of ZnO (RZnO) varies exponentially with relative humidity RH% and its average humidity sensitivity in the range of (20 to 50 RH%) was 52% and 95%  in the range of (50 to 90 % RH). The sensing response to Ammonia, Ethanol and Methanol vapors were recorded with different concentrations. The sensitivity of ZnO senor is greater for Methanol but the it's selectivity was better for Ammonia.

Keywords


SP/065

Full Text:

PDF

References


Antony, R. , Mathews, T. , Dasgupta, A. , Dash, S. , Tyagi ,A.K., et al. (2011). Rapid breakdown anodization technique for the synthesis of high aspect ratio and high surface area anatase TiO2 nanotube powders. Journal of Solid State Chemistry. 184 : 624–632.

Park, S. ,Paek, Y., Lee, H., & Kim, Y.(2010). Lithium ion insertion in Titania nanotube powders synthesized by rapid breakdown anodization . Electrochemical and Solid-State Letters, 13(7): A85-A87.

Ki-Woong, Ch. , Qifeng, Z., Jeong S., Yoon-Ha J., & Guozhong C. (2010).Low-temperature solution growth of ZnO nanotube arrays. Beilstein J. Nanotechnol. 1: 128–134.

Parvin, S., Hamid Reza M., Alireza Z.(2017). ZnO nanotubes: Preparation and photocatalytic performance evaluation. Journal of Photochemistry and Photobiology A: Chemistry. 337(15):91-99.

Kan‐Sen, Ch., Chia‐Hsuan, L., and Bo‐Tau, L,.(2016). Effect of microstructure of ZnO nanorod film on humidity sensing. Journal of the American ceramic society. 99(2):531-535.

Chang, C. C. and Fang, S.K. (2000).A study of the design of ZnO thin film pressure sensors. International Journal of Electronics. 87(8): 1013-1023 .

Ling, Z.,and Wen, Z., (2017) .Room-temperature gas sensing of ZnO-based gas sensor: A review Sensors and Actuators A: Physical Volume 267: 242-261.

Mohamad Hafiz, M., Tetsuo, S., and Mohamad Rusop,. M.,(2015). Humidity Sensor - A Review of Nanostructured Zinc Oxide (ZnO)-Based Humidity Sensor, Advanced Materials Research (Volume 1109), p.395-400,2015.

Thomas Stanley, H.,(2010). A Zinc oxide nanowire pressure sensor, Ph.D.thesis, University of Stellenbosch.

Siarhei, V., (2016). Zinc Oxide Thin Film Transistor Pressure Sensors,Ph.D.thesis, University of CALIFORNIA, SAN DIEGO.

Jone, T. M.,(2004). Chemistry made simple. Philip Lief group, Inc.

Panaitescu, E., Richter, C., and Menon, L.,(2008) . A study of titania nanotube synthesis in chloride-ion-containing media. Journal of The Electrochemical Society, 155 (1) E7-E13.

Wu, Z. Y., Bao, Z. X., Zou, X. P., Tang, D. S., Liu, C. X. et al.(2003). Conductance and phase transition of free standing ZnO nanocrystals under high pressure. Materials Science and Technology .19 :981-984.

Pandey, N. K., and Karunesh T., (2010).Morphological and relative humidity sensing properties of pure ZnO nanomaterial. Sensors & Transducers Journal, 122( 11) : 9-19 .

Nancy,A., Roopa K. , Rai, P.K., and Jeyaprakash, B.G.,(2018). Gold functionalized ZnO nanowires as a fast response/recovery ammonia sensor, Applied Surface Science. 449(15) : 244-249.

Ikram, U., and Abdul-Majeed, A,.(2012). Experimental artifacts for morphological tweaking of chemical sensor materials: Studies on ZnO. Sensors. 12: 8259-8277; doi:10.3390/s120608259 .

Chaikarn, L., and Sukon, Ph.,(2007). Influence of thickness on ethanol sensing characteristics of doctor-bladed thick film from flame-made ZnO Nanoparticles. 7: 185-201.

Sudhir, Ch., Hardik, J., and Anoop L., (2012).A Methanol sensor incorporating nanostructured ZnO and integrated microheater on thermally isolated planar MEMS platform. SENSOR DEVICES . The third international conference on sensor device technologies and applications.

Dhivya, P., and Sridharan, M.,(2014). Nanostructured ZnO Films for room temperature Ammonia sensing. Journal of ELECTRONIC MATERIALS. 43( 9):3211–3216 .


Refbacks

  • There are currently no refbacks.